Investigation of Transparent Conductive Oxide Films Deposited by Co-sputtering of ITO and AZO
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چکیده
منابع مشابه
Deposited Indium Tin Oxide (ito) Thin Films by Dc- Magnetron Sputtering on Polyethylene Terephthalate Substrate (pet)
M.K.M. ALI , K. IBRAHIM , OSAMA S HAMAD , M.H. EISA , M.G. FARAJ , and F. AZHARI 1 School of Physics, University Sains Malaysia, Penang 11800, Malaysia Department of Physics, College of Science, Sudan University of Science and Technology, Khartoum 11113, Sudan School of Electrical and Electronic Engineering, University Sains Malaysia, Penang 11800, Malaysia E-mail: [email protected], kamarul@...
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We fabricated europium and silver co-doped tantalum-oxide (Ta2O5:Eu, Ag) thin films using a simple co-sputtering method for the first time, and we evaluated their photoluminescence (PL) and X-ray diffraction (XRD) properties. We found that the most remarkable PL peak at a wavelength of 615 nm due to Eu can be enhanced by Ag doping, and the strongest PL peak can be obtained from a Ta2O5:Eu, Ag t...
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Crystalline tantalum thin films of about 500nm thickness were deposited on AISI 316L stainless steel substrate using magnetron sputtering. To investigate the nano-mechanical properties of tantalum films, deposition was performed at two temperatures (25°C and 200°C) on TaNx intermediate layer with different N2/Ar flow rate ratio from 0 to 30%. Nano-indentation was performed to obtain the mechani...
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ژورنال
عنوان ژورنال: Journal of the Korean institute of surface engineering
سال: 2009
ISSN: 1225-8024
DOI: 10.5695/jkise.2009.42.3.128